Introduction
This equipment is used to
coat thin, uniform layer of materials like
photo resist, epoxy, paint, adhesive on
substrates of glass, silicon, metal and
plastic. The substrate is held on a vacuum
chuck. Material to be coated is dispensed
to it completely. Chuck is made to spin
at a high speed. While most of the liquid
on surface is thrown off, last layer remains.
It dries quickly leaving a thin, uniform
coating whose thickness depends upon speed,
surface tension and viscosity.
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Features
Photo Resist Spinner is
based on a hollow shaft motor especially
developed for this application. It permits
mounting of vacuum chuck directly on the
motor shaft, eliminating belt and its
related problems of acceleration, tension
and slippage. Hence, it gives trouble
free service. The vacuum chuck is easily
detachable for cleaning and change.
Specifications
| Speed
range |
1
to 6 KRPM in 6 steps |
|
Timer |
10
– 60 secs. in 6 steps |
Substrate
size |
75
mm maximum |
Overall
size |
H
310 x W 230 x D 250 mm |
Weight
of the equipment |
8.3
Kgs. |
|
“O”
ring size |
30 x 3 mm |
Power |
230
± 5% AC, 50 Hz, 100 VA |
|
